Lead frame for improving adhesive fillets on semiconductor die corners

ABSTRACT

The present disclosure is directed to a lead frame including a die pad with cavities, and methods for attaching a semiconductor die to the lead frame. The cavities allow for additional adhesive to be formed on the die pad at the corners of the semiconductor die, and prevent the additional adhesive from overflowing on to active areas of the semiconductor die.

BACKGROUND Technical Field

The present disclosure is directed to a lead frame and methods forattaching a semiconductor die to the lead frame.

Description of the Related Art

A semiconductor package typically includes a semiconductor die and alead frame. The lead frame supports the semiconductor die and carrieselectrical signals between the semiconductor die and an external source,such as a printed circuit board (PCB). Generally, a semiconductor die isattached to a die pad of a lead frame by dispensing adhesive on to thedie pad, and then placing the semiconductor die on the adhesive.

In order for the semiconductor die to be securely attached to the diepad, it is important to have a sufficient amount of adhesive joining theouter edges of the semiconductor die and the die pad together. Portionsof the adhesive at the outer edges of the semiconductor die are oftenreferred to as adhesive fillets. There are a variety of factors that mayaffect the formation of proper adhesive fillets, such as the placementaccuracy of the semiconductor die on to the adhesive, a dispense patternof the adhesive, the placement accuracy of the dispense pattern, and thesurface properties of the lead frame (e.g., wettability). Without properadhesive fillets between the outer edges of the semiconductor die andthe die pad, the adhesive may delaminate. Consequently, thesemiconductor die may detach from the die pad and/or be damaged.

Proper adhesive fillets are particularly important at the corners of thesemiconductor die. The corners of the semiconductor die are points ofhigh stress and will often detach from the die pad. Unfortunately, goodadhesive fillets at the corners of the semiconductor die are difficultto achieve. Often, the adhesive fillets at the corners of thesemiconductor die are very small or non-existent.

BRIEF SUMMARY

The present disclosure is directed to a lead frame, and methods forattaching a semiconductor die to the lead frame.

The lead frame includes a die pad, and cavities in the die pad. Thesemiconductor die is attached to the lead frame by forming adhesive onthe die pad and in the cavities, and then placing the semiconductor dieon the adhesive. The semiconductor die is positioned on the die pad suchthat each of the corners of the semiconductor die directly overlies oris otherwise aligned with a respective cavity.

The cavities allow additional adhesive to be formed at the corners ofthe semiconductor die, and, thus, improve the formation of largeadhesive fillets at the corners. As a result, the strength of theadhesion between the die pad and the semiconductor die is improved. Inaddition, the cavities provide a receptacle for the additional adhesiveto prevent the additional adhesive from overflowing on to active areas(e.g., a sensor, electrical circuit, electrical component, etc.) of thesemiconductor die, and possibly damaging the active areas.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

In the drawings, identical reference numbers identify similar featuresor elements. The size and relative positions of features in the drawingsare not necessarily drawn to scale.

FIG. 1 is a plan view of a lead frame according to one embodimentdisclosed herein.

FIG. 2 is a cross-sectional view of the lead frame shown in FIG. 1according to one embodiment disclosed herein.

FIG. 3 is a plan view of adhesive formed on the lead frame of FIG. 1according to one embodiment disclosed herein.

FIG. 4 is a cross-sectional view of the adhesive and the lead frameshown in FIG. 3 according to one embodiment disclosed herein.

FIG. 5 is a plan view of a semiconductor die positioned on the adhesiveand the lead frame of FIG. 3 according to one embodiment disclosedherein.

FIG. 6 is a cross-sectional view of the semiconductor die, the adhesive,and the lead frame shown in FIG. 5 according to one embodiment disclosedherein.

FIG. 7 is an angled, perspective view of the semiconductor die, theadhesive, and the lead frame shown in FIG. 5 according to one embodimentdisclosed herein.

FIG. 8 is an enlarged view of the circled area shown in FIG. 7 accordingto one embodiment disclosed herein.

FIG. 9 is a plan view of adhesive formed on the lead frame of FIG. 1according to another embodiment disclosed herein.

FIG. 10 is a cross-sectional view of the adhesive and the lead frameshown in FIG. 9 according to one embodiment disclosed herein.

FIG. 11 is a plan view of adhesive formed on the lead frame of FIG. 1using a stencil according to another embodiment disclosed herein.

FIG. 12 is a cross-sectional view of the adhesive, the lead frame, andthe stencil shown in FIG. 11 according to one embodiment disclosedherein.

FIG. 13 is a plan view of a lead frame according to another embodimentdisclosed herein.

FIG. 14 is a cross-sectional view of the lead frame shown in FIG. 13according to one embodiment disclosed herein.

FIG. 15 is a plan view of a lead frame according to another embodimentdisclosed herein.

FIG. 16 is a cross-sectional view of the lead frame shown in FIG. 15according to one embodiment disclosed herein.

FIG. 17 is a plan view of a semiconductor die positioned on adhesive anda lead frame according to another embodiment disclosed herein.

FIG. 18 is a cross-sectional view of the semiconductor die, theadhesive, and the lead frame shown in FIG. 17 according to oneembodiment disclosed herein.

DETAILED DESCRIPTION

In the following description, certain specific details are set forth inorder to provide a thorough understanding of various aspects of thedisclosed subject matter. However, the disclosed subject matter may bepracticed without these specific details. In some instances, well-knownstructures and methods of manufacturing electronic devices have not beendescribed in detail to avoid obscuring the descriptions of other aspectsof the present disclosure.

Unless the context requires otherwise, throughout the specification andclaims that follow, the word “comprise” and variations thereof, such as“comprises” and “comprising,” are to be construed in an open, inclusivesense, that is, as “including, but not limited to.”

Reference throughout the specification to “one embodiment” or “anembodiment” means that a particular feature, structure, orcharacteristic described in connection with the embodiment is includedin at least one embodiment. Thus, the appearance of the phrases “in oneembodiment” or “in an embodiment” in various places throughout thespecification are not necessarily all referring to the same aspect.Furthermore, the particular features, structures, or characteristics maybe combined in any suitable manner in one or more aspects of the presentdisclosure.

Reference throughout the specification to integrated circuits isgenerally intended to include integrated circuit components built onsemiconducting or glass substrates, whether or not the components arecoupled together into a circuit or able to be interconnected. Throughoutthe specification, the term “layer” is used in its broadest sense toinclude a thin film, a cap, or the like, and one layer may be composedof multiple sub-layers.

It is noted that the dimensions set forth herein are provided asexamples. Other dimensions are envisioned for this embodiment and allother embodiments of this application.

Current methods to improve the formation of adhesive fillets at thecorners of the semiconductor die typically include dispensing a largeramount of adhesive on the die pad where the corners of the semiconductordie are positioned. However, such methods that simply increase theamount of adhesive are generally incompatible with semiconductor dicewith exposed active areas (e.g., a sensor, electrical circuit,electrical component, etc.). When increasing the amount of adhesive atthe corners of the semiconductor die, the adhesive will often overflowon to the active areas of the semiconductor die and cause thesemiconductor die to malfunction. For example, the adhesive will oftenoverflow from the die pad, along the side surfaces of the semiconductordie, and on to the active areas in an upper surface (i.e., the surfacefacing away from the die pad of the lead frame) of the semiconductordie. This problem is particularly common for thin semiconductor dice, asthe additional adhesive may easily overflow on to the upper surface ofthe semiconductor die.

The present disclosure is directed to a lead frame and methods forattaching a semiconductor die to the lead frame. The lead frame includesa die pad with cavities that are positioned at the corners of thesemiconductor die. The cavities allow for additional adhesive to beformed on the die pad at the corners of the semiconductor die, andprevent the additional adhesive from overflowing on to active areas ofthe semiconductor die. As a result, large adhesive fillets may be formedat the corners of the semiconductor die, and the adhesion between thesemiconductor die and the lead frame is improved.

FIGS. 1 and 2 , FIGS. 2 and 3 , and FIGS. 5 and 6 are subsequent stagesof a die attach process for attaching a semiconductor die to a leadframe according to one embodiment disclosed herein.

FIG. 1 is a plan view of a lead frame 10 according to one embodimentdisclosed herein. FIG. 2 is a cross-sectional view of the lead framealong a line 2-2 shown in FIG. 1 according to one embodiment disclosedherein. It is beneficial to review FIGS. 1 and 2 together.

The lead frame 10 provides a platform for a semiconductor die 11; andcarries electrical signals between the semiconductor die 11 and anexternal source, such as a printed circuit board (PCB). The attachmentof the semiconductor die 11 to the lead frame 10 will be discussed infurther detail with respect to FIGS. 5 and 6 .

The lead frame 10 includes a plurality of supports or tie bars 12, aplurality of leads 14, and a die pad 16. The lead frame 10, includingthe supports 12, the leads 14, and the die pad 16, may be made of anytype of conductive material. For example, the lead frame 10 may be madeof steel, aluminum, copper, gold, or another type of conductivematerial. The lead frame 10 may be fabricated using standard fabricationtechniques known or later developed. For example, the lead frame 10 maybe formed by pattern deposition, a combination of blanket deposition andetching, or stamping a continuous conductive or metal sheet.

The supports 12 are coupled to and extend from corners of the die pad16. The supports 12 are used to mount the die pad 16 to a substrate,such as a semiconductor substrate or a PCB. In one embodiment, thesupports 12 and the die pad 16 are a single, contiguous piece.

The leads 14 surround the die pad 16. For example, as shown in FIG. 1 ,the leads 14 are positioned on each of the four sides of the die pad 16.The leads 14 are used to carry electrical signals between thesemiconductor die 11, specifically an integrated circuit within thesemiconductor diel 1, and an external source, such as a PCB. In oneembodiment, the leads 14 are electrically coupled to the semiconductordie 11 by bonding wires that extend between the semiconductor die 11 andthe leads 14.

It is noted that, although four leads are shown on each of the foursides of the die pad 16, the lead frame 10 may include any number ofleads. Further, the leads may be arranged in a variety of differentpatterns. For example, the lead frame 10 may include 10, 20, or 30 leadson a single side, two sides, or three sides of the die pad 16.

The die pad 16 provides a platform for the semiconductor die 11. The diepad 16 includes cavities 18 or dimples that extend in to a surface 20 ofthe die pad 16. In one embodiment, the surface 20 of the die pad 16 iscontinuous except for the cavities 18 in the surface 20. Stateddifferently, the die pad 16 is planar except for the cavities 18. Asbest shown in FIG. 2 , the cavities 18 extend partially in to the diepad 16, and do not extend all the way through the die pad 16. As will bediscussed in further detail with respect to FIGS. 5 and 6 , the cavities18 ensure that there is a sufficient amount of adhesive dispensed at thecorners of the semiconductor die 11, and that the adhesive does notoverflow on to active areas of the semiconductor die 11.

In one embodiment, the cavities 18 are positioned to correspond withcorners (i.e., where two adjacent sides of the semiconductor die 11meet) of the semiconductor die 11, which will be mounted on the surface20 of the die pad 16. For example, the dashed box 22 indicates aposition of the semiconductor die 11 on the surface 20. As thesemiconductor die 11, in this example, is rectangular in shape, eachside of the semiconductor die 11 is positioned between and aligned withtwo of the cavities 18, and a respective cavity of the cavities 18 ispositioned to directly underlie each of the four corners 24 of thesemiconductor die 11. Stated differently, the semiconductor die 11 ispositioned such that each of the corners 24 extends past an edge of thesurface 20 of the die pad 16, and overhangs above the cavities 18. Theposition and attaching of the semiconductor die 11 to the die pad 16will be discussed in further detail with respect to FIGS. 5 and 6 .

In one embodiment, as shown in FIGS. 1 and 2 , each of cavities 18 isrounded, such that the plan view of the cavities 18 shown in FIG. 1 arecircular. However, other shapes are possible. For example, each of thecavities 18 may have an oval shape or an “L” shape from a plan view. Theoval shaped and “L” shaped cavities will be discussed in further detailwith respect to FIGS. 13 and 16 .

The semiconductor die 11 is mounted to the surface 20 of the die pad 16by forming a layer of adhesive on the surface 20, and placing thesemiconductor die 11 on the adhesive. FIG. 3 is a plan view of adhesiveor die attach material 26 formed on the lead frame 10 according to oneembodiment disclosed herein. FIG. 4 is a cross-sectional view of theadhesive 26 and the lead frame 10 along a line 4-4 shown in FIG. 3according to one embodiment disclosed herein. It is beneficial to reviewFIGS. 3 and 4 together. It is noted that the cross section shown in FIG.4 shows portions of the adhesive 26 that are positioned a distance fromthe line 4-4 of FIG. 3 , such as a center 27 of the adhesive 26.

The adhesive 26 is formed on the surface 20 and in the cavities 18 ofthe die pad 16. The adhesive 26 may be any type of adhesive material. Inone embodiment, the adhesive 26 is epoxy.

The adhesive 26 may formed on the surface 20 in a variety of patterns.In one embodiment, as shown in FIG. 3 , the adhesive 26 is formed on thesurface 20 in a cross or “X” shaped pattern. Namely, the adhesive 26extends between two of the cavities 18 that are diagonal from eachother. The cross or “X” shaped pattern ensures that there is sufficientadhesive between the critical areas of the semiconductor die 11 and thedie pad 16. Namely, the cross or “X” shaped pattern ensures that thereis sufficient adhesive between the corners 24 and a center of thesemiconductor die 11, and the die pad 16. Other adhesive patterns arealso possible. For example, as will be discussed in further detail withrespect to FIGS. 9 and 10 , the adhesive 26 may be formed in each of thecavities 18 with a smaller cross or “X” shaped pattern that issurrounded by and spaced from the cavities 18.

In one embodiment, the adhesive 26 overfills the cavities 18 such thatthe adhesive 26 fills cavities 18, overflows out of the cavities 18, andextends past (i.e., above) the surface 20. As will be discussed infurther detail with respect to FIGS. 5 and 6 , the adhesive 26 isoverfilled to ensure that a sufficient amount of adhesive is dispensedat the corners of the semiconductor die 11, and that the adhesive 26does not overflow on to active areas of the semiconductor die 11.

In one embodiment, the cavities 18 are filled with the adhesive 26 suchthat the portions of the adhesive 26 that overflow out of the cavities18 and extend past (i.e., above) the surface 20 have substantially thesame thickness as portions of the adhesive 26 that are on the surface 20(e.g., the center 27 of the adhesive 26). For example, as shown in FIG.4 , portions 25 of the adhesive 26 that directly overlie the cavities 18and are above the surface 20 have a thickness 28. Said differently, theadhesive at cavities 18 has a first thickness in the cavity, between thesurface 20 and a bottom of the cavity, and a second thickness 28 fromthe surface 20 to a top or outermost surface of the adhesive. Portionsof the adhesive 26 that are on the surface 20 (e.g., the center 27 ofthe adhesive 26) have a thickness 30 that is substantially equal to thethickness 28. As will be discussed in further detail with respect toFIGS. 5 and 6 , the substantially uniform thickness of the adhesive 26allows the adhesive 26 to be evenly formed between the semiconductor die11 and the surface 20 of the die pad 16.

In one embodiment, the adhesive 26 is formed on the surface 20 with anadhesive dispenser 23. The adhesive dispenser 23 scans across thesurface and dispenses the adhesive 26 on to the surface 20 and in to thecavities 18. To overfill the cavities 18 as discussed above, theadhesive dispenser 23 is delayed when the adhesive dispenser 23 directlyoverlies the cavities 18. Namely, when the adhesive dispenser 23directly overlies the surface 20 (e.g., the center 27 of the adhesive26), the adhesive dispenser 23 is held in the same position for a firsttime period before moving on, to ensure that the adhesive 26 has thethickness 30. When the adhesive dispenser 23 directly overlies thecavities 18 as shown, for example, in FIG. 4 , the adhesive dispenser 23is held above the cavities 18 for a second time period, which is greaterthan the first time period. Delaying the adhesive dispenser 23 over thecavities 18 ensures that the adhesive 26 fills the cavities 18 and hasthe thickness 28 above the cavities 18.

Once the adhesive 26 is formed on the surface 20 of the die pad 16, thesemiconductor die 11 is placed on the adhesive 26 to attach thesemiconductor die 11 to the die pad 16. FIG. 5 is a plan view of thesemiconductor die 11 positioned on the adhesive 26 and the lead frame 10according to one embodiment disclosed herein. FIG. 6 is across-sectional view of the semiconductor die 11, the adhesive 26, andthe lead frame 10 along a line 6-6 shown in FIG. 5 according to oneembodiment disclosed herein. It is noted that, in FIG. 6 , the portionof the adhesive 26 that is formed between the cavities 18 and on theside surface of the semiconductor die 11 is removed to show the adhesivebetween the semiconductor die 11 and the surface 20. FIG. 7 is anangled, perspective view of the semiconductor die 11, the adhesive 26,and the lead frame 10 according to one embodiment disclosed herein. FIG.8 is an enlarged view of the circled area shown in FIG. 7 according toone embodiment disclosed herein. It is beneficial to review FIGS. 5 to 8together. The semiconductor die 11, the adhesive 26, and the lead frame10 together may be considered to be a semiconductor package.

The semiconductor die 11 is attached to the die pad 16 by positioningthe semiconductor die 11 on the adhesive 26. The semiconductor die 11may be placed on the adhesive 26 using standard die attach processingtechniques known or later developed. For example, the semiconductor die11 may be placed on the adhesive 26 using a pick-and-place tool.

In one embodiment, the semiconductor die 11 is positioned on the die pad16 such that each of the corners 24 of the semiconductor die 11 directlyoverlies a respective cavity of the cavities 18. Stated differently,each of the corners 24 extends past an edge of the surface 20 of the diepad 16, and overhangs above the cavities 18. For example, as shown inFIGS. 5 and 6 , since the semiconductor die 11 is rectangular in shape,the four corners 24 of the semiconductor die 11 are aligned with each ofthe four cavities 18. In one embodiment, each of the corners 24 of thesemiconductor die 11 is positioned at or near a center of a respectivecavity of the cavities 18.

In one embodiment, the semiconductor die 11 includes a plurality ofactive areas 32. Each of the active areas 32 may be a sensor, anelectrical circuit, a processor, an electrical component, or any othertype of electronic device. In one embodiment, as shown in FIG. 5 , theactive areas 32 are formed in a surface 34 of the semiconductor die 11.

In one embodiment, when the semiconductor die 11 is placed on theadhesive 26 as shown in FIG. 3 , a downward pressure (i.e., a pressurewith a direction towards the surface 20 of the die pad 16) is applied tothe semiconductor die 11 such that the adhesive 26 spreads between asurface 29 of the semiconductor die 11 and the surface 20 of the die pad16. As discussed with respect to FIG. 4 , the portions of the adhesive26 that overflow out of the cavities 18 and extend past (i.e., above)the surface 20 have substantially the same thickness as portions of theadhesive 26 that are on the surface 20 (e.g., the center 27 of theadhesive 26). The substantially uniform thickness of the adhesive 26allows the adhesive 26 to be spread evenly between the surface 29 of thesemiconductor die and the surface 20 of the die pad 16 when the downwardpressure is applied. In one embodiment, as best shown in FIG. 8 , theadhesive 26 also spreads along side surfaces 31 of the semiconductor die11 to form adhesive fillets along the edges, including the corners 24,of the semiconductor die 11. The spreading of the adhesive 26 and theforming the adhesive fillets provide a strong adhesion between the diepad 16 and the semiconductor die 11. It is noted the adhesive 26 may notalways spread along the side surfaces 31. In some cases, the adhesive 26may spread to form adhesive fillets at the corners 24 without formingadhesive fillets along one or more of the side surfaces 31.

As previously discussed, current methods to improve the formation ofadhesive fillets at the corners of the semiconductor die typicallyinclude dispensing a larger amount of adhesive on the die pad where thecorners of the semiconductor die are positioned. However, such methodsare generally incompatible with semiconductor packages, particularlythin semiconductor packages, with exposed active areas, as theadditional adhesive will often overflow on to active areas of thesemiconductor die. The cavities 18 allow additional adhesive to beformed at the corners 24 of the semiconductor die 11. The additionaladhesive improves the formation of large adhesive fillets 36 at thecorners 24. Stated differently, as best shown in FIG. 8 , the additionaladhesive ensures that the adhesive 26 is formed at and on the corners24, and the adhesive 26 extends away from the semiconductor die 11. As aresult, the strength of the adhesion between the die pad 16 and thesemiconductor die 11 is improved. In addition, the cavities 18 provide areceptacle for the additional adhesive to prevent the additionaladhesive from overflowing on the active areas 32 of the semiconductordie 11. Namely, the additional adhesive will flow in to the cavities 18rather than overflow on to the surface 34 of the semiconductor die 11.As a result, the additional adhesive is prevented from contaminating theactive areas 32 and causing the active areas 32 to malfunction.

Once the semiconductor die 11 is attached to the die pad 16, thesemiconductor die 11 is electrically coupled to the leads 14. In oneembodiment, the semiconductor die 11 is electrically coupled to theleads 14 via a plurality of bond wires, with each of the bond wiresextending from the semiconductor die 11 to a respective lead.

As discussed with respect to FIG. 3 , in one embodiment, the adhesive 26is formed on the surface 20 of the die pad 16 in a cross or “X” shapedpattern. However, other adhesive patterns are possible. FIG. 9 is a planview of an adhesive 42 formed on the lead frame 10 according to anotherembodiment disclosed herein. FIG. 10 is a cross-sectional view of theadhesive 42 and the lead frame 10 along a line 10-10 shown in FIG. 9according to one embodiment disclosed herein. It is noted that the crosssection shown in FIG. 10 shows portions of the adhesive 42 that arepositioned a distance from the line 10-10, such as the center 44 of theadhesive 42.

Similar to the adhesive 26, the adhesive 42 is formed on the surface andin the cavities 18 of the die pad 16. However, in contrast to theadhesive pattern shown in FIG. 3 , the cross or “X” shaped portion ofthe adhesive 42 is spaced from the cavities 18 by a distance 38.

The space between the cross or “X” shaped portion of the adhesive 26 andthe cavities 18 decreases the total amount of adhesive formed on the diepad 16. As such, the adhesive pattern shown in FIGS. 11 and 12 issuitable for adhesives with low viscosity. Generally, adhesives with lowviscosity are easily spreadable compared to adhesive with highviscosity, and, thus, less adhesive may be used to adhere thesemiconductor die 11 to the die pad 16. In addition, using less adhesivedecreases fabrication costs.

The space between the cross or “X” shaped portion of the adhesive 42 andthe cavities 18 also further decreases the risk of the adhesive 42 atthe corners 24 of the semiconductor die 11 (i.e., the adhesive formed inthe cavities 18) overflowing on to the active areas 32 of thesemiconductor die 11.

In one embodiment, similar to the adhesive 26, the adhesive 42 overfillsthe cavities 18 such that the adhesive 42 fills cavities 18, overflowsout of the cavities 18, and extends past (i.e., above) the surface 20.In addition, in one embodiment, the cavities 18 are filled with theadhesive 42 such that the portions of the adhesive 42 that overflow outof the cavities 18 and extend past (i.e., above) the surface 20 havesubstantially the same thickness as portions of the adhesive 42 that areon the surface 20 (e.g., the center 44 of the adhesive 42).

FIG. 9 illustrates an embodiment where there are cavities 18 in the leadframe with a first portion of adhesive in the cavities and a secondportion of adhesive in an area defined by the cavities. Various patternsare envisioned for the second portion of the adhesive. In oneembodiment, the first portion has a first thickness that is greater thana second thickness of the second portion. The first portions are spacedfrom the second portions by a distance.

As discussed with respect to FIG. 4 , in one embodiment, adhesive isformed on the surface 20 of the die pad 16 with an adhesive dispenser23. In another embodiment, adhesive (e.g., the adhesive 26 and theadhesive 42) is formed on the surface 20 using a stencil. FIG. 11 is aplan view of the adhesive 42 formed on the lead frame 10 using a stencil40 according to another embodiment disclosed herein. FIG. 12 is across-sectional view of the adhesive 42, the lead frame 10, and thestencil 40 along a line 12-12 shown in FIG. 11 according to oneembodiment disclosed herein. It is noted that the cross section shown inFIG. 12 shows portions of the adhesive 42 that are positioned a distancefrom the line 10-10, such as the center 44 of the adhesive 42.

The stencil 40 includes apertures that are arranged in the same patternas the adhesive 42. Namely, the stencil 40 includes four circularapertures 46 that have the same diameter as the cavities 18, and a crossor “X” shaped aperture 48 between the circular apertures 46.

The stencil 40 is overlaid above the surface 20 of the die pad 16 withthe four circular apertures 46 being aligned with the cavities 18. Forexample, as shown in FIG. 12 , the stencil 40 is positioned above thesurface 20 such that the circular apertures 46 directly overlie thecavities 18.

Once the stencil 40 is overlaid above the surface 20 of the die pad 16,the adhesive 42 is dispensed by spreading the glue through the stencil40. Namely, the adhesive 42 is dispensed from a first side 50 of thestencil 40, through the circular apertures 46 and the cross or “X”shaped aperture 48, to a second side 52 of the stencil 40, and on to thesurface 20, where the adhesive 42 is formed in the pattern as shown inFIG. 9 .

Although the stencil 40 is discussed with respect to forming theadhesive 42, a stencil may also be used to form the adhesive 26 shown inFIGS. 3 and 4 .

As discussed with respect to FIGS. 1 and 2 , in one embodiment, each ofthe cavities 18 is circular. However, larger cavities with differentshapes are also possible.

FIG. 13 is a plan view of a lead frame 54 according to anotherembodiment disclosed herein. FIG. 14 is a cross-sectional view of thelead frame 54 along a line 14-14 shown in FIG. 13 according to oneembodiment disclosed herein. It is beneficial to review FIGS. 13 and 14together.

Similar to the lead frame 10, the lead frame 54 includes a plurality ofsupports 56, a plurality of leads 58, and a die pad 60. However, thesizes of cavities 62 in the die pad 60 are larger than the cavities 18,and the plan view of the cavities 62 shown in FIG. 13 are oval. In oneembodiment, as shown in FIG. 13 , each of the cavities 62 extendslengthwise towards a center of the die pad 60.

The cavities 62 allow an increased amount of adhesive to be formed inthe cavities 62 and at the corners 24 of the semiconductor die 11. Theadditional adhesive improves the formation of adhesive fillets at thecorners 24 and, thus, increases the strength of the adhesion between thedie pad 60 and the semiconductor die 11. In one embodiment, each cornerof the die is aligned within a wider portion of the oval, closer to acenter point of the oval than a boundary of the oval.

FIG. 15 is a plan view of a lead frame 64 according to anotherembodiment disclosed herein. FIG. 16 is a cross-sectional view of thelead frame 64 along a line 16-16 shown in FIG. 15 according to oneembodiment disclosed herein. It is beneficial to review FIGS. 15 and 16together.

Similar to the lead frame 10, the lead frame 64 includes a plurality ofsupports 66, a plurality of leads 68, and a die pad 70. However, thesizes of cavities 72 in the die pad 70 are larger than the cavities 18,and the plan view of the cavities 72 shown in FIG. 15 are “L” shaped. Inone embodiment, as shown in FIG. 15 , each of the cavities 72 includes afirst portion that extends along a first side of the die pad 70, and asecond portion that extends along a second side, which is adjacent tothe first side, of the die pad 70.

Similar to the cavities 62 shown in FIGS. 13 and 14 , the cavities 72allow an increased amount of adhesive to be formed in the cavities 72and at the corners 24 of the semiconductor die 11. The additionaladhesive improves the formation of large adhesive fillets at the corners24 and, thus, increases the strength of the adhesion between the die pad70 and the semiconductor die 11.

The alternative embodiment in FIG. 15 can be formed with a differenttype of etch or removal technique in that instead of curved or roundededges, the edges may be more rectangular. While illustrated as L-shaped,these rectangular cavities may have a variety of shapes. Each cavity hasa volume, and the edge of the die is aligned within each volume. Eachcavity has edges or walls and the edges of the die are positioned withinthe edges or walls of the cavity.

The lead frames shown in FIGS. 1 to 16 are shown with a downsetconfiguration. Namely, the supports 12 and the leads 14 are multi-level(i.e., each include a first portion, and a second portion higher thanthe first portion) to raise the die pad. In these embodiments, theentire die pad will be encapsulated by a molding compound when packaged,and at least one surface of the leads will be left exposed. For example,referring to FIG. 6 , both the upper surface 20 and the lower surface(i.e., the surface opposite to the surface 20) of the die pad 16 will becovered with a molding compound, and the leads 14 will be left exposed.However, a die pad with cavities as discussed with respect to FIGS. 1 to16 may be used in conjunction with other types of lead frame packages.For example, the die pad 16 with the cavities 18 shown in FIGS. 5 and 6may be used in leadless semiconductor packages.

FIG. 17 is a plan view of the semiconductor die 11 positioned onadhesive 26 and a lead frame 74 according to another embodimentdisclosed herein. FIG. 18 is a cross-sectional view of the semiconductordie 11, the adhesive 26, and the lead frame 74 shown in FIG. 17according to one embodiment disclosed herein. In contrast to the leadframe 10, the lead frame 74 is used in, for example, a quad-flatno-leads (QFN) package.

Similar to the lead frame 10, the lead frame 74 includes a plurality ofleads 76 and a die pad 78, and the die pad 78 includes cavities 80. Thedie pad 78 and the cavities 80 are substantially similar to the die pad16 and the cavities 18. However, in contrast to the lead frame 10, thelead frame 74 does not have a downset configuration. Namely, the leadframe 74 does not include supports or tie bars attached to the die pad78, and the leads 76 are not multi-level (i.e., the leads 76 areplanar). In this embodiment, upper surfaces of the die pad 78 and theleads 76 will be encapsulated by a molding compound when packaged, andlower surfaces of the die pad 78 and the leads 76 will be left exposed.For example, referring to FIG. 18 , surfaces 81 of the leads 76 and asurface 83 of the die pad 78 will be covered with a molding compound,and surfaces 84 of the leads and a surface 82 of the die pad 78 will beleft exposed.

The various embodiments provide a lead frame including a die pad withcavities, and methods for attaching a semiconductor die to the leadframe. The cavities are positioned at the corners of the semiconductordie, and allow additional adhesive to be formed at the corners of thesemiconductor die. As a result of the additional adhesive, largeadhesive fillets are formed at the corners of the semiconductor die, andthe adhesion between the semiconductor die and the lead frame isimproved. Further, the cavities prevent the additional adhesive fromoverflowing on to active areas of the semiconductor die.

The various embodiments described above can be combined to providefurther embodiments. These and other changes can be made to theembodiments in light of the above-detailed description. In general, inthe following claims, the terms used should not be construed to limitthe claims to the specific embodiments disclosed in the specificationand the claims, but should be construed to include all possibleembodiments along with the full scope of equivalents to which suchclaims are entitled. Accordingly, the claims are not limited by thedisclosure.

1. A device, comprising: a die pad including: a surface; and first,second, third, and fourth cavities extending in to the surface, thefirst and second cavities being aligned with each other in a firstdirection, the third and fourth cavities being aligned with each otherin the first direction, the first and third cavities being aligned witheach other in a second direction that is transverse to the firstdirection, the second and fourth cavities being aligned with each otherin the second direction, each of the first, second, third, and fourthcavities having an L shape with a first portion extending in the firstdirection and a second portion extending in the second direction, thesurface of the die pad being continuous except for the first, second,third, and fourth cavities; and a plurality of leads surrounding the diepad.
 2. The device of claim 1, further comprising: adhesive on thesurface of the die pad and in the first, second, third, and fourthcavities; and a die attached to the die pad by the adhesive, the dieincluding first, second, third, and fourth corners that directly overliethe first, second, third, and fourth cavities, respectively.
 3. Thedevice of claim 2 wherein the first, second, third, and fourth cornersdirectly overlie an intersection of the first and second portions of thefirst, second, third, and fourth cavities, respectively.
 4. The deviceof claim 1 wherein the plurality of leads include first, second, third,and fourth plurality of leads that are positioned on first, second,third, and fourth sides, respectively, of the die pad.
 5. The device ofclaim 1 wherein the first portion of each of the first, second, third,and fourth cavities is aligned with the first portion of another cavityof the first, second, third, and fourth cavities, and the second portionof each of the first, second, third, and fourth cavities is aligned withthe second portion of another cavity of the first, second, third, andfourth cavities.
 6. A device, comprising: a die pad having a surface;and a plurality of cavities extending into the surface of the die pad,each of the plurality of cavities including a first portion extending ina first direction and a second portion extending in a second directiontransverse to the first direction.
 7. The device of claim 6 wherein thefirst portion of each of the plurality of cavities is aligned with thefirst portion of another cavity of the plurality of cavities, and thesecond portion of each of the plurality of cavities is aligned with thesecond portion of another cavity of the plurality of cavities.
 8. Thedevice of claim 6 wherein the plurality of cavities includes first,second, third, and fourth cavities.
 9. The device of claim 8 wherein thefirst cavity is aligned with the second cavity in the first directionand aligned with the third cavity in the second direction, the secondcavity is aligned with the fourth cavity in the second direction, thethird cavity is aligned with the fourth cavity in the first direction.10. The device of claim 6 wherein the surface of the die pad iscontinuous except for the plurality of cavities.
 11. The device of claim6, further comprising: adhesive on the surface and in the plurality ofcavities; and a die on the adhesive, the die including a plurality ofcorners, each of the plurality of corners directly overlying arespective cavity of the plurality of cavities.
 12. The device of claim6, further comprising: a plurality of leads surrounding the die pad. 13.A device, comprising: a lead frame including a die pad having a surface,and a plurality of cavities that extend into the surface, the surface ofthe die pad being continuous except for the plurality of cavities, eachof the plurality of cavities having a first portion extending in a firstdirection and a second portion extending in a second directiontransverse to the second direction; adhesive on the surface and in theplurality of cavities; and a die on the adhesive, the die including aplurality of corners, each of the plurality of corners directlyoverlying a respective cavity of the plurality of cavities.
 14. Thedevice of claim 13 wherein the adhesive is on each of the plurality ofcorners of the die.
 15. The device of claim 13 wherein the plurality ofcavities includes only four cavities.
 16. The device of claim 13,further comprising: a plurality of leads that are positioned on first,second, third, and fourth sides of the die pad.
 17. The device of claim13 wherein the die includes first and second sides extending the firstdirection, and third and fourth sides extending in the second direction.18. The device of claim 13 wherein the first portion of each of theplurality of cavities is aligned with the first portion of anothercavity of the plurality of cavities, and the second portion of each ofthe plurality of cavities is aligned with the second portion of anothercavity of the plurality of cavities.
 19. The device of claim 13 whereinthe plurality of cavities includes first, second, third, and fourthcavities.
 20. The device of claim 19 wherein the first cavity is alignedwith the second cavity in the first direction and aligned with the thirdcavity in the second direction, the second cavity is aligned with thefourth cavity in the second direction, the third cavity is aligned withthe fourth cavity in the first direction.